SEMICONDUCTOR BIOSENSOR

Organization Name

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

Inventor(s)

YI-HSING Hsiao of HSINCHU CITY TW

JUI-CHENG Huang of HSINCHU CITY TW

YU-JIE Huang of KAOHSIUNG CITY TW

SEMICONDUCTOR BIOSENSOR

This abstract first appeared for US patent application 18985094 titled 'SEMICONDUCTOR BIOSENSOR

Original Abstract Submitted

A semiconductor biosensor includes a semiconductor layer having a first surface and a second surface opposite to the first surface, a FET device in the semiconductor layer, an isolation layer over the first surface of the semiconductor layer, a pair of first electrodes over the isolation layer, and a pair of second electrodes over the isolation layer. The FET device includes a gate structure disposed over the second surface of the semiconductor layer. The isolation layer includes a rectangular opening substantially aligned with the FET device. The pair of second electrodes is separated from the pair of first electrodes.