18982902. CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD (ASML Netherlands B.V.)
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
Organization Name
Inventor(s)
Marco Jan-Jaco Wieland of Delft NL
Vincent Sylvester Kuiper of Monster NL
Anagnostis Tsiatmas of San Jose CA US
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
This abstract first appeared for US patent application 18982902 titled 'CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
Original Abstract Submitted
An assessment method comprising: using an assessment apparatus to generate assessment signals representing a property of a surface of a sample; processing the assessment signals to identify candidate defects and outputting a candidate defect signal; monitoring the status of the assessment apparatus for error conditions and generating a status signal indicating any error conditions during functioning of the assessment apparatus; and analysing the candidate defect signal to determine if the candidate defects are real defects; wherein analysis of a candidate defect is not completed if the status signal indicates that the assessment signal(s) and/or the candidate defect signal corresponding to the candidate defect would have been affected by an error condition.