18982155. CALIBRATION HARDWARE FOR ION IMPLANTER (Taiwan Semiconductor Manufacturing Co., Ltd.)
CALIBRATION HARDWARE FOR ION IMPLANTER
Organization Name
Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor(s)
Hsin-Sheng Liang of Hsinchu TW
CALIBRATION HARDWARE FOR ION IMPLANTER
This abstract first appeared for US patent application 18982155 titled 'CALIBRATION HARDWARE FOR ION IMPLANTER
Original Abstract Submitted
A horizontally oriented calibration jig for a wafer gripper arm of an ion implanter is disclosed. The calibration jig is mounted within the process chamber of the ion implanter. The calibration jig includes a mounting plate that spans a diameter of the wafer gripper arm, a support stand passing through the mounting plate, and a calibration plate at a bottom end of the support stand. The perimeter of the calibration plate includes a plurality of notches. The calibration plate is rotated. If any finger of the wafer gripper arm falls into a notch, the rotating calibration plate stops. The finger is then adjusted until it does not fall into a notch.