18973938. PROCESS CONTROL KNOB ESTIMATION (Applied Materials, Inc.)
PROCESS CONTROL KNOB ESTIMATION
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PROCESS CONTROL KNOB ESTIMATION
This abstract first appeared for US patent application 18973938 titled 'PROCESS CONTROL KNOB ESTIMATION
Original Abstract Submitted
A non-transitory machine-readable storage medium includes instructions that, when executed by a processing device, cause the processing device to perform operations. The operations include receiving (i) sensor data indicating a first state of a coating of a processing chamber subsequent to a chamber recovery procedure and (ii) substrate process data indicating a set of process parameter values associated with performing a substrate processing procedure by the processing chamber having the coating in a second state prior to the chamber recovery procedure. The operations further include processing the sensor data and the substrate process data to determine an update to at least one of the set of process parameter values. The operations further include performing a) preparing a notification indicating the update for presentation on a graphical user interface or b) causing the processing chamber to perform a selection of the substrate processing procedure based on the update.