18968655. IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME (SAMSUNG ELECTRONICS CO., LTD.)
IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
Organization Name
Inventor(s)
Changhwa Kim of Hwaseong-si KR
IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
This abstract first appeared for US patent application 18968655 titled 'IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
Original Abstract Submitted
An image sensor includes a substrate including a first surface and a second surface which is opposite to the first portion, and a pixel isolation portion provided in the substrate and configured to isolate unit pixels from each other. The pixel isolation portion includes a first filling insulation pattern extending from the first surface toward the second surface and having an air gap region, the first filling insulation pattern including a first sidewall and a second sidewall which is opposite to the first sidewall, a conductive structure including a first portion on the first sidewall, a second portion on the second sidewall, and a connection portion connecting the first portion and the second portion, and an insulating liner provided between the first portion and the substrate and between the second portion and the substrate.