18962380. SHOWERHEAD FOR PROCESS TOOL (Tokyo Electron Limited)

SHOWERHEAD FOR PROCESS TOOL

Organization Name

Tokyo Electron Limited

Inventor(s)

Anthony Dip of Cedar Creek TX US

SHOWERHEAD FOR PROCESS TOOL

This abstract first appeared for US patent application 18962380 titled 'SHOWERHEAD FOR PROCESS TOOL

Original Abstract Submitted

In one example, an apparatus includes a processing chamber; a substrate holder disposed in the processing chamber; and a showerhead disposed over the substrate holder. The showerhead includes a first zone disposed in a central region of the showerhead, the first zone including a first cavity, a plurality of first fluid exit holes aligned to output a fluid from the first cavity towards the substrate holder, a first flow path fluidly coupled to a fluid source, and a plurality of first fluid distribution pathways fluidly coupling the first flow path with the first cavity.