18948225. METHODS OF MANUFACTURING RESISTOR DEVICES (Micron Technology, Inc.)
METHODS OF MANUFACTURING RESISTOR DEVICES
Organization Name
Inventor(s)
Ahmed N. Noemaun of Boise ID (US)
Durga P. Panda of Boise ID (US)
METHODS OF MANUFACTURING RESISTOR DEVICES
This abstract first appeared for US patent application 18948225 titled 'METHODS OF MANUFACTURING RESISTOR DEVICES
Original Abstract Submitted
A method of manufacturing a resistor device includes forming a stepped trench in a substrate, and forming an etch stop material within the stepped trench. An electrically resistive material is disposed within the stepped trench, and an electrically insulating material is disposed on the electrically resistive material. The method further includes repeating the disposing the electrically resistive material and the disposing the electrically insulating material operations a predetermined number of times.