18947903. MODIFICATION METHOD AND MODIFICATION DEVICE (Tokyo Electron Limited)
MODIFICATION METHOD AND MODIFICATION DEVICE
Organization Name
Inventor(s)
Takafumi Nogami of Nirasaki-shi (JP)
Kenichi Kote of Nirasaki-shi (JP)
MODIFICATION METHOD AND MODIFICATION DEVICE
This abstract first appeared for US patent application 18947903 titled 'MODIFICATION METHOD AND MODIFICATION DEVICE
Original Abstract Submitted
A method of modifying a film formed on a substrate, includes: generating plasma by a microwave in an interior of a processing container in which a stage on which a substrate is placed is provided; and periodically applying a DC voltage to the stage in the interior of the processing container in which the plasma is generated by the generating the plasma, and irradiating the substrate with electrons in the plasma.