18946976. TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR (Tokyo Electron Limited)
TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
Organization Name
Inventor(s)
Norihiko Amikura of Miyagi (JP)
Masahiro Dogome of Miyagi (JP)
Takami Fukasawa of Yamanashi (JP)
Daisuke Hayashi of Yamanashi (JP)
Toshiaki Toyomaki of Miyagi (JP)
TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
This abstract first appeared for US patent application 18946976 titled 'TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
Original Abstract Submitted
A transfer device for simultaneously or separately transferring a wafer and a consumable part having a circular shape is disclosed. The consumable part is disposed in a wafer processing module, and the outer diameter of the consumable part is larger than the outer diameter of the wafer. The transfer device comprises an end effector configured to place the wafer and the consumable part thereon simultaneously or separately, an arm configured to move the end effector, and a controller configured to control the arm, to place the consumable part on the end effector such that the center of gravity of the consumable part coincides with a first position when transferring the consumable part, and to place the wafer on the end effector such that the center of gravity of the wafer coincides with a second position between the first position and front ends of the end effector when transferring the wafer.