18942200. METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL (Applied Materials, Inc.)
METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL
Organization Name
Inventor(s)
Kevin Brashear of San Jose CA (US)
Ashley M. Okada of San Jose CA (US)
Dennis L. Demars of Santa Clara CA (US)
Zhiyuan Ye of San Jose CA (US)
Jaidev Rajaram of Bangalore (IN)
Marcel E. Josephson of San Jose CA (US)
METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL
This abstract first appeared for US patent application 18942200 titled 'METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL
Original Abstract Submitted
A master controller identifies a flow ratio setpoint for at least one of a process gas or a carrier gas flow to a process chamber through a set of mass flow controllers. The master controller determines an amount of gas loss within the system due to the abatement sub-system. The master controller determines a flow setpoint for the at least one of the process gas flow or the carrier gas flow through each of the set of mass flow controllers based on the identified flow ratio setpoint and the determined amount of gas loss. The master controller controls the at least one of the process gas flow or the carrier gas flow through each of the set of mass flow controllers according to the determined flow setpoint for each of the set of mass flow controllers
