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18938928. OPTICAL WAVEGUIDE PASSIVATION FOR MOISTURE PROTECTION (CISCO TECHNOLOGY, INC.)

From WikiPatents

OPTICAL WAVEGUIDE PASSIVATION FOR MOISTURE PROTECTION

Organization Name

CISCO TECHNOLOGY, INC.

Inventor(s)

Li Chen of Maynard MA (US)

Long Chen of Maynard MA (US)

Christopher Doerr of Maynard MA (US)

OPTICAL WAVEGUIDE PASSIVATION FOR MOISTURE PROTECTION

This abstract first appeared for US patent application 18938928 titled 'OPTICAL WAVEGUIDE PASSIVATION FOR MOISTURE PROTECTION

Original Abstract Submitted

In part, in one aspect, the disclosure relates to a method for passivating a waveguide of an optical circuit. The method includes etching a suspended waveguide in the optical circuit; the suspended waveguide having a top surface, a bottom surface, and side surfaces; and covering the top surface and side surfaces of the suspended waveguide with a passivation coating having a thickness that ranges from between about 10 nm to about 20 nm. In one embodiment, the method further includes removing one or more coatings from a portion of the optical circuit. The disclosure also relates to various passivated optical silicon circuit embodiments.

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