18934812. METHOD AND DEVICE WITH IN-FAB WAFER YIELD PREDICTION (Samsung Electronics Co., Ltd.)
METHOD AND DEVICE WITH IN-FAB WAFER YIELD PREDICTION
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METHOD AND DEVICE WITH IN-FAB WAFER YIELD PREDICTION
This abstract first appeared for US patent application 18934812 titled 'METHOD AND DEVICE WITH IN-FAB WAFER YIELD PREDICTION
Original Abstract Submitted
A method and a device for predicting a yield of an in-fab wafer including: generating at least one virtual process path on a residual process of the in-fab wafer; and predicting the yield of a virtual fab-out wafer that corresponds to the at least one virtual process path by using a trained yield predicting model are provided.