18929782. SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD (SEMES CO., LTD.)
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Organization Name
Inventor(s)
Kyung Min Kim of Cheonan-si KR
Sung Bum Park of Cheonan-si KR
Soo Young Park of Cheonan-si KR
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
This abstract first appeared for US patent application 18929782 titled 'SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Original Abstract Submitted
Disclosed is a substrate treating apparatus including: a substrate support unit for supporting and rotating a substrate; a liquid supply unit for supplying a treatment solution onto the substrate; a collection cup provided to surround the substrate support unit, and having a plurality of collection spaces for collecting a treatment solution scattered from the substrate; a lifting unit for changing a relative position between the collection cup and the substrate; and a controller for controlling the lifting unit to vary a relative height between the substrate and the collection cup in accordance with a process recipe for treating the substrate.