18929587. BACK-ILLUMINATED SENSOR AND METHOD OF MAKING SAME (KLA Corporation)
BACK-ILLUMINATED SENSOR AND METHOD OF MAKING SAME
Organization Name
Inventor(s)
Ting Fung Chung of Milpitas CA US
Sisir Yalamanchili of Fremont CA US
BACK-ILLUMINATED SENSOR AND METHOD OF MAKING SAME
This abstract first appeared for US patent application 18929587 titled 'BACK-ILLUMINATED SENSOR AND METHOD OF MAKING SAME
Original Abstract Submitted
An image sensor includes a p-type silicon layer, a silicon layer disposed on the p-type silicon layer, a p-type SiGe layer disposed on the p-type silicon layer, a boron layer disposed on the p-type SiGe layer, and an anti-reflective coating disposed on the boron layer. A trench can be formed in the image sensor such that the boron layer is disposed in the trench.