18929282. HIGH SPEED SUBSTRATE SORTER (Applied Materials, Inc.)
HIGH SPEED SUBSTRATE SORTER
Organization Name
Inventor(s)
Asaf Schlezinger of Modi'in IL
Markus J. Stopper of Voerstetten DE
HIGH SPEED SUBSTRATE SORTER
This abstract first appeared for US patent application 18929282 titled 'HIGH SPEED SUBSTRATE SORTER
Original Abstract Submitted
Disclosed herein are a substrate sorter, an inspection and sorting system having the substrate sorter, and a method for the inspection and sorting system. The substrate sorter includes an annular gripper comprising a rotator and a plurality of vacuum applicators concyclically disposed around an axis, a carrier operable to move a substrate towards the rotator and into a loading region below the rotator, and an actuator coupled with the annular gripper and operable to rotate the rotator about the axis relative to the plurality of vacuum applicators while one or more of the plurality of vacuum applicators hold the substrate against the rotator.