18928355. METHODS AND APPARATUS FOR SUSCEPTOR LEVELING (ASM IP Holding B.V.)
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
Organization Name
Inventor(s)
Hannelore Azora Hemminger of Tempe AZ US
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
This abstract first appeared for US patent application 18928355 titled 'METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
Original Abstract Submitted
Various embodiments of the present technology may provide a susceptor with adjustment mechanisms coupled to the shaft of the susceptor. A flexible rotary shaft may be coupled to the adjustment mechanism, and a motor may be connected to the flexible rotary shaft to rotate the adjustment mechanism. The adjustment mechanism may be one that moves susceptor in a horizontal direction or one that moves the susceptor in a vertical direction.