18928314. METHODS AND APPARATUS FOR SUSCEPTOR LEVELING (ASM IP Holding B.V.)
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
Organization Name
Inventor(s)
Hannelore Azora Hemminger of Tempe AZ US
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
This abstract first appeared for US patent application 18928314 titled 'METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
Original Abstract Submitted
Various embodiments of the present technology may provide a susceptor and a sensing system coupled to the susceptor and configured to generate a plurality of sensor output signals indicating air flow across the susceptor and sensing system. A controller is connected to the sensing system and configured to detect a flow pattern on the susceptor based on the sensor output signals.