FILLER MEMBER AND SUBSTRATE TREATING APPARATUS

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FILLER MEMBER AND SUBSTRATE TREATING APPARATUS

This abstract first appeared for US patent application 18926562 titled 'FILLER MEMBER AND SUBSTRATE TREATING APPARATUS

Original Abstract Submitted

Disclosed is a substrate treating apparatus including: a chamber providing a treatment space therein; a substrate support member located inside the chamber and for supporting a substrate; a supply port for supplying a treatment fluid into the treatment space of the chamber; a filler member located between the supply port and the substrate to fill a portion of a volume of the treatment space, in which the filler member has perforations, and the perforations are provided in a collision shape such that treatment fluids passing through the perforations collide each other.