18925862. METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE (ASM IP Holding B.V.)

METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE

Organization Name

ASM IP Holding B.V.

Inventor(s)

Elisa K. Atosuo of Espoo FI

Mikko Ritala of Espoo FI

METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE

This abstract first appeared for US patent application 18925862 titled 'METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE

Original Abstract Submitted

The present disclosure relates to methods and apparatuses for depositing metal phosphide-containing material on a substrate by a cyclic deposition process. The method comprises providing a substrate in a reaction chamber, providing a metal halide precursor into the reaction chamber in a vapor phase; and providing a second precursor into the reaction chamber in a vapor phase to form metal phosphide-containing material on the substrate.