18924053. IGNITION CONDITION CALCULATION METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
IGNITION CONDITION CALCULATION METHOD AND PLASMA PROCESSING APPARATUS
Organization Name
Inventor(s)
Morihito Inagaki of Yamanashi JP
IGNITION CONDITION CALCULATION METHOD AND PLASMA PROCESSING APPARATUS
This abstract first appeared for US patent application 18924053 titled 'IGNITION CONDITION CALCULATION METHOD AND PLASMA PROCESSING APPARATUS
Original Abstract Submitted
An ignition condition calculation method includes (A) searching for ignition condition information including first plasma state information when a plasma is ignited under a preset ignition condition, and storing the ignition condition information in a storage; (B) searching for misfire condition information including second plasma state information when the plasma misfires after the plasma has been ignited, and storing the misfire condition information in the storage; and (C) displaying the ignition condition information and the misfire condition information on a display.
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