18923685. POLISHING APPARATUS (EBARA CORPORATION)
POLISHING APPARATUS
Organization Name
Inventor(s)
Matsutaro Miyamoto of Tokyo JP
POLISHING APPARATUS
This abstract first appeared for US patent application 18923685 titled 'POLISHING APPARATUS
Original Abstract Submitted
A technology that can clean a bottom surface of a dresser while inhibiting a cleaning solution discharged from a cleaning nozzle from splashing in a direction of a polishing pad. A polishing apparatus includes a polishing table , a top ring , a dresser , at least one cleaning nozzle , and a dresser rotation mechanism . The at least one cleaning nozzle discharges a cleaning solution Lq in a fan shape and in a direction away from a polishing pad Pd, and an intersection point IP where a discharge central axis XL of the cleaning solution intersects with a bottom surface of the dresser is positioned closer to the at least one cleaning nozzle than a center line CL of the bottom surface of the dresser. The at least one cleaning nozzle discharges the cleaning solution such that a part of the cleaning solution discharged from the cleaning nozzle and contacting the bottom surface of the dresser moves and passes through the center C of the bottom surface of the dresser.