18919048. SINGLE WAFER ORIENTATION TOOL-INDUCED SHIFT CLEANING (KLA Corporation)
SINGLE WAFER ORIENTATION TOOL-INDUCED SHIFT CLEANING
Organization Name
Inventor(s)
Peter Paquet of Ann Arbor MI US
Fang-Jyun Yeh of Tainan City TW
Suryanarayanan Ganesan of San Ramon CA US
Shankar Krishnan of Santa Clara CA US
Taher Kagalwala of Fremont CA US
Derrick A. Shaughnessy of San Jose CA US
Stilian Pandev of Santa Clara CA US
Min-Yeong Moon of Ann Arbor MI US
SINGLE WAFER ORIENTATION TOOL-INDUCED SHIFT CLEANING
This abstract first appeared for US patent application 18919048 titled 'SINGLE WAFER ORIENTATION TOOL-INDUCED SHIFT CLEANING
Original Abstract Submitted
A metrology system may include a spectroscopic metrology sub-system and a controller, the controller including one or more processors configured to execute program instructions configured to cause the one or more processors to: generate a tool-induced shift (TIS) model of a training sample by the metrology sub-system comprising: receiving training data from metrology measurements of the training sample, the training data comprising spectral data associated with at least one off-diagonal Mueller matrix element generated by one or more first measurements of the training sample at a first azimuthal angle and one or more second measurements of the training sample at a second azimuthal angle, deriving overlay spectra data and TIS spectra data from the training data, decomposing the overlay spectra data and the TIS spectra data, and inferring a TIS signature for the training sample; and to remove the TIS signature from a test sample.
- KLA Corporation
- Amnon Manassen of Haifa IL
- Peter Paquet of Ann Arbor MI US
- Yingpin Wu of Taipei TW
- Fang-Jyun Yeh of Tainan City TW
- Suryanarayanan Ganesan of San Ramon CA US
- Jordan Pio of Hillsboro OR US
- Shankar Krishnan of Santa Clara CA US
- Taher Kagalwala of Fremont CA US
- Derrick A. Shaughnessy of San Jose CA US
- Yan Zhang of Fremont CA US
- Stilian Pandev of Santa Clara CA US
- Min-Yeong Moon of Ann Arbor MI US
- G01N21/21
- G01N21/95
- CPC G01N21/211