18914725. TRANSPORT DEVICE AND TRANSPORT METHOD (SUMITOMO HEAVY INDUSTRIES, LTD.)
TRANSPORT DEVICE AND TRANSPORT METHOD
Organization Name
SUMITOMO HEAVY INDUSTRIES, LTD.
Inventor(s)
TRANSPORT DEVICE AND TRANSPORT METHOD
This abstract first appeared for US patent application 18914725 titled 'TRANSPORT DEVICE AND TRANSPORT METHOD
Original Abstract Submitted
A transport device for transporting a cryopump includes a bogie that includes a front wheel and a rear wheel, a mast that extends from a front side of the bogie in a height direction, a raising and lowering unit that is supported by the mast and that has a changeable height, a guide rail that extends forward from the raising and lowering unit, an arm that is supported by the guide rail and that is slidable in a front-rear direction, a cargo platform that is provided at a tip part of the arm and that holds the cryopump, and a counterweight that is provided on a rear side of the bogie.