18904552. NITROGEN-CONTAINING SILANE COMPOUND AND METHOD FOR PRODUCING SAME (Shin-Etsu Chemical Co., Ltd.)
NITROGEN-CONTAINING SILANE COMPOUND AND METHOD FOR PRODUCING SAME
Organization Name
Inventor(s)
Yoichi Tonomura of Joetsu-shi JP
NITROGEN-CONTAINING SILANE COMPOUND AND METHOD FOR PRODUCING SAME
This abstract first appeared for US patent application 18904552 titled 'NITROGEN-CONTAINING SILANE COMPOUND AND METHOD FOR PRODUCING SAME
Original Abstract Submitted
A nitrogen-containing silane compound having the general formula (1):