18899215. PRECURSOR CAPSULE, A VESSEL AND A METHOD (ASM IP Holding B.V.)

PRECURSOR CAPSULE, A VESSEL AND A METHOD

Organization Name

ASM IP Holding B.V.

Inventor(s)

Chiyu Zhu of Helsinki FI

Jaakko Anttila of Helsinki FI

PRECURSOR CAPSULE, A VESSEL AND A METHOD

This abstract first appeared for US patent application 18899215 titled 'PRECURSOR CAPSULE, A VESSEL AND A METHOD

Original Abstract Submitted

The current disclosure relates to a precursor capsule for holding a precursor for a vapor deposition process. The precursor capsule comprises a vapor-permeable shell configured to define a precursor space, and to allow precursor in vapor form to leave the precursor capsule under vaporization conditions. The disclosure further relates to a precursor vessel comprising capsules according to the current disclosure, to a vapor deposition apparatus and a method.