18899185. CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING (SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION)
CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING
Organization Name
SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
Inventor(s)
CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING
This abstract first appeared for US patent application 18899185 titled 'CHEMICAL LIQUID PURIFICATION APPARATUS FOR SEMICONDUCTOR MANUFACTURING
Original Abstract Submitted
Provided is a chemical liquid purification apparatus for semiconductor manufacturing, the apparatus including a first tank configured to store a chemical liquid, the chemical liquid including impurities, a first line configured to supply the chemical liquid to the first tank, a first electrode and a second electrode included in the first tank, an alternating current waveform generator connected to the first electrode and the second electrode, a second line configured to supply the chemical liquid processed in the first tank to an outside of the first tank, and a filter configured to filter the impurities in the chemical liquid flowing in the second line.