ACCELERATION SENSOR

Organization Name

Inventor(s)

Martin Wilfried Heller of Kyoto-shi (JP)

ACCELERATION SENSOR

This abstract first appeared for US patent application 18898410 titled 'ACCELERATION SENSOR

Original Abstract Submitted

An acceleration sensor includes a device-side substrate having a first main surface and a second main surface facing the first main surface, a recessed portion recessed from the first main surface toward the second main surface side, a MEMS electrode that is provided in the recessed portion, includes a fixed electrode having a first fixed electrode and a second fixed electrode electrically insulated from the first fixed electrode, and a movable electrode having a first movable electrode and a second movable electrode electrically insulated from the first movable electrode, and constitutes a differential circuit, and an isolation joint that mechanically connects the first movable electrode and the second movable electrode while electrically insulating the first movable electrode and the second movable electrode.