18896265. REMOTE PLASMA SOURCE (Applied Materials, Inc.)
REMOTE PLASMA SOURCE
Organization Name
Inventor(s)
Kartik Ramaswamy of San Jose CA US
Mehran Moalem of Fremont CA US
Farhad Moghadam of Saratoga CA US
Eller Y. Juco of San Leandro CA US
REMOTE PLASMA SOURCE
This abstract first appeared for US patent application 18896265 titled 'REMOTE PLASMA SOURCE
Original Abstract Submitted
Some embodiments are directed to a remote plasma system. The remote plasma system may include: a first tube; a second tube; a first isolation component coupled between a first end of the first tube and a first end of the second tube; a second isolation component coupled between a second end of the first tube and a second end of the second tube; and a first capacitive element coupled to the first isolation component.
