COOLING DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD

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COOLING DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD

This abstract first appeared for US patent application 18894357 titled 'COOLING DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD

Original Abstract Submitted

There is provided that a cooling device for cooling a cooling target, including a circulation system configured to circulate a refrigerant for cooling the cooling target, wherein a container including a region where heat is exchanged between the refrigerant and at least a part of the cooling target is provided in the circulation system, the refrigerant is a mixed refrigerant obtained by mixing a first refrigerant of a first boiling point and a second refrigerant of a second boiling point higher than the first boiling point, the circulation system circulates the mixed refrigerant so that the mixed refrigerant enters the container at a predetermined temperature, and the first refrigerant has a vapor pressure higher than a pressure resistance of the container at the predetermined temperature.