18892288. SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS (SCREEN Holdings Co., Ltd.)
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Organization Name
Inventor(s)
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
This abstract first appeared for US patent application 18892288 titled 'SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Original Abstract Submitted
A substrate transfer apparatus including the control unit is configured to advance the sensor holding member between a first substrate that is a substrate to be transferred and a second substrate that is on a lower side of the first substrate, and to measure a minimum distance between the substrates, based on a sum of a first minimum distance and a second minimum distance, the first minimum distance being a distance with respect to the substrate at a first measurement point where the first sensor is closest to the first substrate, and the second minimum distance being a distance with respect to the substrate at a second measurement point where the second sensor is closest to the second substrate, and to adjust a height at which the hand is advanced, based on the minimum distance between the substrates so that a distance between the hand and the first substrate and a distance between the hand and the second substrate both become equal to or more than a predetermined distance, when the hand is advanced between the first substrate and the second substrate.
