18890814. SEMICONDUCTOR DEVICE (ROHM CO., LTD.)
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Masaki Nagata of Kyoto-shi (JP)
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 18890814 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
A semiconductor device includes a semiconductor layer including a first surface and a second surface opposite to the first surface; a source trench formed in the semiconductor layer and including a side wall that is continuous with the second surface; an insulation layer formed on the second surface of the semiconductor layer; an embedded electrode arranged in the source trench and insulated from the side wall of the source trench by the insulation layer; a source interconnection formed on the insulation layer; and a source contact plug electrically connecting the source interconnection to the semiconductor layer. The source contact plug contacts the embedded electrode, and the source contact plug contacts the semiconductor layer via a part of the side wall of the source trench.