18890408. CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING (Lam Research Corporation)
CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING
Organization Name
Inventor(s)
Eller Y. Juco of Tualatin OR (US)
Karl Frederick Leeser of West Linn OR (US)
CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING
This abstract first appeared for US patent application 18890408 titled 'CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING
Original Abstract Submitted
An apparatus and method for performing closed-loop multiple-output control of radio frequency (RF) matching for a semiconductor wafer fabrication process is provided.