18889183. SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS (ASM IP Holding B.V.)
SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS
Organization Name
Inventor(s)
Dieter Pierreux of Pepingen BE
Theodorus G.M. Oosterlaken of Oudewater NL
Herbert Terhorst of Amersfoort NL
SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS
This abstract first appeared for US patent application 18889183 titled 'SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS
Original Abstract Submitted
In general, the various aspects of the technology of the present disclosure relate to semiconductor manufacturing apparatuses and processes which may comprise two or more accumulators connected in parallel to each other. The apparatus may have a solid-state precursor sublimator upstream from said two or more accumulators employed by the process.