18889069. SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASSEMBLIES (ASM IP Holding B.V.)

SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASSEMBLIES

Organization Name

ASM IP Holding B.V.

Inventor(s)

Bhagyesh Purohit of Helsinki FI

Saima Alli of Helsinki FI

Eva E. Tois of Espoo FI

Marko Tuominen of Helsinki FI

Charles Dezelah of Helsinki FI

Vincent Vandalon of Heverlee BE

Adam Vianna of Phoenix AZ US

Krzysztof Kamil Kachel of Chandler AZ US

Eric James Shero of Phoenix AZ US

Yi Cheng Zhang of Scottsdale AZ US

Anirudhan Chandrasekaran of Scottsdale AZ US

SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASSEMBLIES

This abstract first appeared for US patent application 18889069 titled 'SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASSEMBLIES

Original Abstract Submitted

The disclosure relates to methods and processing assemblies for selectively depositing organic polymer material on a first surface of a substrate relative to a second surface of the substrate by a cyclic deposition process is disclosed. The method comprises providing a substrate in a reaction chamber, providing a first vapor-phase organic reactant into the reaction chamber and providing a second vapor-phase organic reactant into the reaction chamber. In the method, the first and second vapor-phase organic reactants form the organic polymer material selectively on the first surface; and the first vapor-phase reactant comprises a cyclic compound comprising at least two primary amine groups.