18888572. PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD (CANON KABUSHIKI KAISHA)
PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD
Organization Name
Inventor(s)
HIROSHI Morikawa of Tochigi JP
PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD
This abstract first appeared for US patent application 18888572 titled 'PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD
Original Abstract Submitted
A processing apparatus performs a predetermined process with respect to a substrate. The apparatus includes a driver configured to drive a stage that holds the substrate, a first controller configured to operate at a first frequency and control the driver, a second controller configured to operate at a second frequency higher than the first frequency and generate a command based on a position of the stage, and a device configured to perform one of the predetermined process in response to the command and a preparation process for the predetermined process.
