18830712. SUBSTRATE SURFACE TREATMENT DEVICE AND SUBSTRATE SURFACE TREATMENT METHOD (TOYOTA JIDOSHA KABUSHIKI KAISHA)
SUBSTRATE SURFACE TREATMENT DEVICE AND SUBSTRATE SURFACE TREATMENT METHOD
Organization Name
TOYOTA JIDOSHA KABUSHIKI KAISHA
Inventor(s)
Hiroshi Yanagimoto of Miyoshi-shi JP
Rentaro Mori of Kasugai-shi JP
Kohsei Gotoh of Nishinomiya-shi JP
Takahiro Hiramatsu of Nishinomiya-shi JP
SUBSTRATE SURFACE TREATMENT DEVICE AND SUBSTRATE SURFACE TREATMENT METHOD
This abstract first appeared for US patent application 18830712 titled 'SUBSTRATE SURFACE TREATMENT DEVICE AND SUBSTRATE SURFACE TREATMENT METHOD
Original Abstract Submitted
Provided is a surface treatment device capable of performing surface treatment on a treatment surface of a substrate at low cost by reusing a mist of a treatment liquid introduced into a treatment chamber. The surface treatment device is a device for surface treatment of a substrate by causing a treatment liquid to adhere to the treatment surface of the substrate. The surface treatment device includes a mist generator that generates a mist of the treatment liquid; a treatment chamber that introduces the mist generated by the mist generator and causes the introduced mist to adhere to the treatment surface of the substrate; and a circulation path that circulates the mist discharged from the treatment chamber to the treatment chamber together with the mist generated by the mist generator.