18830121. SEMICONDUCTOR DEVICES, MICROELECTROMECHANICAL SYSTEM GAS SENSOR, METHODS (Infineon Technologies AG)
SEMICONDUCTOR DEVICES, MICROELECTROMECHANICAL SYSTEM GAS SENSOR, METHODS
Organization Name
Inventor(s)
David Tumpold of Kirchheim beim München DE
Tobias Mittereder of München DE
Mohammadamir Ghaderi of Regensburg DE
Sebastian Schwagerl of Cham DE
SEMICONDUCTOR DEVICES, MICROELECTROMECHANICAL SYSTEM GAS SENSOR, METHODS
This abstract first appeared for US patent application 18830121 titled 'SEMICONDUCTOR DEVICES, MICROELECTROMECHANICAL SYSTEM GAS SENSOR, METHODS
Original Abstract Submitted
In accordance with an embodiment, a semiconductor device includes: a radiator comprising a radiation layer configured to radiate an electromagnetic wave; a detector comprising a detection layer configured to detect the electromagnetic wave; a substrate; and an interface layer arranged between the radiator or the detector and the substrate, where a thermal conductivity of the radiator or the detector is different from a thermal conductivity of the interface layer.