18826618. METHOD FOR MANUFACTURING VIBRATION POWER GENERATION DEVICE (SEIKO EPSON CORPORATION)
METHOD FOR MANUFACTURING VIBRATION POWER GENERATION DEVICE
Organization Name
Inventor(s)
Takashi Miyata of Shiojiri-shi (JP)
Yukio Yamauchi of Chino-shi (JP)
METHOD FOR MANUFACTURING VIBRATION POWER GENERATION DEVICE
This abstract first appeared for US patent application 18826618 titled 'METHOD FOR MANUFACTURING VIBRATION POWER GENERATION DEVICE
Original Abstract Submitted
A method for manufacturing a vibration power generation device includes: patterning a first silicon layer to form a first comb electrode and a second comb electrode; supplying an alkali ion solution to a surface of the first comb electrode and a surface of the second comb electrode in a state in which a voltage is applied between the first comb electrode and the second comb electrode in such a way that the first comb electrode has a higher potential than the second comb electrode; drying the alkali ion solution; forming a first oxide film on the surface of the first comb electrode and forming a second oxide film on the surface of the second comb electrode by heating the first silicon layer; and a applying a voltage to the second comb electrode to charge the second oxide film.