18826577. DEPOSITION APPARATUS (Samsung Display Co., LTD.)
DEPOSITION APPARATUS
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DEPOSITION APPARATUS
This abstract first appeared for US patent application 18826577 titled 'DEPOSITION APPARATUS
Original Abstract Submitted
A deposition apparatus including a deposition chamber having an inner space that accommodates a substrate and provides a vacuum or non-vacuum state to the substrate, the inner space defined by a floor surface, a ceiling surface and a wall surface, a gas spraying part that is accommodated in the inner space, includes a lower surface facing the substrate and an upper surface, and sprays gas onto the substrate, and a substrate conveying part accommodated in the inner space, having the substrate disposed thereon, and moving the substrate in the first direction. A thickness of the gas spraying part varies along the second direction, and in the non-vacuum state, the lower surface of the gas spraying part has a curved surface, and in the vacuum state, the lower surface of the gas spraying part has a flat surface on a plane defined by the first direction and the second direction.