18811897. SUBSTRATE DEGAS STATION (Applied Materials, Inc.)
SUBSTRATE DEGAS STATION
Organization Name
Inventor(s)
Thomas Brezoczky of Los Gatos CA (US)
Punnati Krushna Reddy of Bangalore (IN)
Azhar Ali M.a. of Bangalore (IN)
Kirankumar Neelasandra Savandaiah of Bangalore (IN)
Lakshmikanth Krishnamurthy Shirahatti of Bangalore (IN)
Dhritiman Subha Kashyap of Bangalore (IN)
SUBSTRATE DEGAS STATION
This abstract first appeared for US patent application 18811897 titled 'SUBSTRATE DEGAS STATION
Original Abstract Submitted
Degas stations for degassing substrates that are conveyed through a substrate processing system on a magnetically levitated carrier and related methods are provided. The degas station includes a housing, a magnetic levitation system coupled to the housing configured to levitate and move a carrier within the housing, a first heater assembly and a second heater assembly. The first heater assembly is disposed in the housing. The first heater assembly includes a first support, a first reflector disposed within the housing by the first support, and a first heat source coupled to reflector. The second heater assembly is disposed in the housing above the first heater assembly. The second heater assembly includes a second support, a second reflector disposed within the housing by the second support, and a second heat source coupled to the second reflector. At least one substrate support member is disposed between the first heater assembly and the second heater assembly.
- Applied Materials, Inc.
- Thomas Brezoczky of Los Gatos CA (US)
- Punnati Krushna Reddy of Bangalore (IN)
- Azhar Ali M.a. of Bangalore (IN)
- Kirankumar Neelasandra Savandaiah of Bangalore (IN)
- Lakshmikanth Krishnamurthy Shirahatti of Bangalore (IN)
- Dhritiman Subha Kashyap of Bangalore (IN)
- H01L21/67
- H01L21/677
- H01L21/687
- CPC H01L21/67115