18808358. SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD (Tokyo Electron Limited)
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
Organization Name
Inventor(s)
Toshichika Takei of Kumamoto (JP)
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
This abstract first appeared for US patent application 18808358 titled 'SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
Original Abstract Submitted
A substrate transfer apparatus includes a transfer arm which includes a base portion; at least one arm portion connected to the base portion to extend from the base portion; a plurality of adsorption units provided in the at least one arm portion and each including a suction port that adsorbs a peripheral edge of a back surface of the substrate; and a plurality of suction passages provided in the at least one arm portion. The adsorption units include a first adsorption unit group including a first adsorption unit and a second adsorption unit; and a second adsorption unit group including a third adsorption unit and a fourth adsorption unit. The suction passages include a first suction passage connected to the suction ports of the first and second adsorption units, and a second suction passage connected to the suction ports of the third and fourth adsorption units.
