SEMICONDUCTOR PACKAGE AND METHOD OF FABRICATING THE SAME

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SEMICONDUCTOR PACKAGE AND METHOD OF FABRICATING THE SAME

This abstract first appeared for US patent application 18802580 titled 'SEMICONDUCTOR PACKAGE AND METHOD OF FABRICATING THE SAME

Original Abstract Submitted

A semiconductor includes a first semiconductor chip, and a second semiconductor chip provided on the first semiconductor chip. The first semiconductor chip includes a first semiconductor substrate including a first front side and a first back side, and a first back-side bonding layer including a first back-side bonding insulating film, and a first back-side bonding pad, wherein the second semiconductor chip includes a second semiconductor substrate including a second front side that faces the first back side and a second back side, and a second front-side bonding layer including a second front-side bonding insulating film bonded to the first back-side bonding insulating film. A side of the first semiconductor chip includes a plurality of first recesses, which are arranged along a vertical direction, and a second recess, which partially exposes a bottom surface of the second front-side bonding layer between the second front-side bonding layer and the first recesses.