18802472. PLANARIZATION METHOD AND METHOD OF MANUFACTURING ARTICLE (CANON KABUSHIKI KAISHA)
PLANARIZATION METHOD AND METHOD OF MANUFACTURING ARTICLE
Organization Name
Inventor(s)
KENJI Yaegashi of Tochigi (JP)
PLANARIZATION METHOD AND METHOD OF MANUFACTURING ARTICLE
This abstract first appeared for US patent application 18802472 titled 'PLANARIZATION METHOD AND METHOD OF MANUFACTURING ARTICLE
Original Abstract Submitted
A planarization method of repeatedly performing a planarization process a plurality of times on the same surface of a substrate is provided. The superstrate is provided with a tapered surface connecting a side end face to a flat surface forming a lower surface facing the substrate. In a second planarization process after a first planarization process, a curable material is supplied so as to cover a region of a cured film formed under the tapered surface in the first planarization process with a liquid film formed in the second planarization process.