18799065. MEASUREMENT DEVICE AND MEASUREMENT METHOD (Kioxia Corporation)
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Organization Name
Inventor(s)
Shutaro Otsuka of Yokohama (JP)
Takuji Ohashi of Yokohama (JP)
Kazuyuki Masukawa of Yokohama (JP)
Takaki Hashimoto of Yokohama (JP)
MEASUREMENT DEVICE AND MEASUREMENT METHOD
This abstract first appeared for US patent application 18799065 titled 'MEASUREMENT DEVICE AND MEASUREMENT METHOD
Original Abstract Submitted
A measurement device includes a first light source configured to generate first light; a first beam splitter configured to split the first light into second light and third light; and a detector configured to receive signal light generated from a subject through irradiating the subject with the second light and the third light. The first light has a wavelength transmittable through a substrate. The second light is vertically incident on a surface of a first film formed on the subject. The third light is vertically incident on a rear surface of the substrate to be coaxial with the second light. A phase of transmitted light through the substrate is opposite to a phase of reflected light. An intensity of the transmitted light is equal to an intensity of the reflected light.