18789634. Electrostatic Chuck Having Multi Zone Gas Cooling (Applied Materials, Inc.)
Electrostatic Chuck Having Multi Zone Gas Cooling
Organization Name
Inventor(s)
Sajad Yazdani of Fremont CA US
Alexander Sulyman of San Francisco CA US
Tomoaki Kohzu of Cupertino CA US
Kyounghwan Na of San Jose CA US
Electrostatic Chuck Having Multi Zone Gas Cooling
This abstract first appeared for US patent application 18789634 titled 'Electrostatic Chuck Having Multi Zone Gas Cooling
Original Abstract Submitted
Embodiments of electrostatic chucks (ESCs) are provided herein. In some embodiments, an electrostatic chuck includes: a dielectric plate having an upper surface and a plurality of mesas extending from the upper surface to a first height to at least partially define a support surface for the substrate; four backside gas cooling zones disposed in the dielectric plate; four gas channels disposed in the dielectric plate and corresponding to the four backside gas cooling zones, wherein the four gas channels are fluidly independent within the dielectric plate and extend from a lower surface of the dielectric plate to a plurality of cooling gas outlets extending to the upper surface within each corresponding cooling zone; a plurality of seal rings extending from the upper surface of the dielectric plate to the first height and defining the four backside gas cooling zones; and one or more electrodes disposed in the dielectric plate.