18783344. NOZZLE MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME (SEMES CO., LTD.)
NOZZLE MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Organization Name
Inventor(s)
Nak Hyun Song of Cheonan-si KR
NOZZLE MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
This abstract first appeared for US patent application 18783344 titled 'NOZZLE MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Original Abstract Submitted
A nozzle module includes a base portion; a nozzle portion disposed on the base portion, and including a first body, and a nozzle portion reciprocating in a first movement direction; and a vessel unit disposed to face the nozzle portion, and including a second body reciprocating in a second movement direction, and an accommodation portion concavely formed inwardly from an upper surface of the second body.
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