18771367. OPTICALLY ACTIVE SHOWERHEAD FOR PROCESS CHAMBER (Applied Materials, Inc.)
OPTICALLY ACTIVE SHOWERHEAD FOR PROCESS CHAMBER
Organization Name
Inventor(s)
Tetsuya Ishikawa of San Jose CA US
Amir H. Tavakoli of San Jose CA US
Ala Moradian of Sunnyvale CA US
OPTICALLY ACTIVE SHOWERHEAD FOR PROCESS CHAMBER
This abstract first appeared for US patent application 18771367 titled 'OPTICALLY ACTIVE SHOWERHEAD FOR PROCESS CHAMBER
Original Abstract Submitted
A showerhead for a process chamber is provided including: a first portion that includes a plurality of gas inlets and a first plurality of gas outlets; and a second portion over the first portion, the second portion including a second plurality of gas outlets, wherein the plurality of gas inlets of the first portion are fluidly coupled to the second plurality of gas outlets of the second portion, the first plurality of gas outlets of the first portion are fluidly coupled to the plurality of gas inlets of the first portion, the second portion is transparent to infrared radiation and ultraviolet radiation, and the first portion is transparent to infrared radiation and opaque to ultraviolet radiation.