18770313. SEMICONDUCTOR DEVICE (Mitsubishi Electric Corporation)
SEMICONDUCTOR DEVICE
Organization Name
Mitsubishi Electric Corporation
Inventor(s)
Naoyuki Kawabata of Tokyo (JP)
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 18770313 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
An extension part of a lower electrode extending to an outer side of an upper electrode in the lower electrode further extends to an upper surface of a semiconductor substrate to cover an end portion of the upper electrode in an outer surrounding part of a trench located, in an outer surrounding region in an extension direction, and a width of the trench is smallest in a trench end portion.