18767607. IMAGE SENSOR INCLUDING GRID STRUCTURE (SAMSUNG ELECTRONICS CO., LTD.)
IMAGE SENSOR INCLUDING GRID STRUCTURE
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IMAGE SENSOR INCLUDING GRID STRUCTURE
This abstract first appeared for US patent application 18767607 titled 'IMAGE SENSOR INCLUDING GRID STRUCTURE
Original Abstract Submitted
An image sensor includes photoelectric conversion devices provided in a substrate comprising first and second surfaces, first and second photoelectric conversion elements in the substrate, first and second separation structures in the substrate, first and second grid structures on the first and second separation structures. The second photoelectric conversion element is disposed between the first separation structure and the second separation structure. The first and second grid structure are vertically overlapping with the first and second separation structure. The first grid structure comprises an air gap and N plurality of layers on an external side surface of the air gap. Each of the N plurality of layers extends in a first direction. The second grid structures comprises M plurality of layers on an external side surface of the second grid structure and extends in the first direction.