18761900. SEPARATING APPARATUS, SEPARATING SYSTEM AND SEPARATING METHOD (Tokyo Electron Limited)
SEPARATING APPARATUS, SEPARATING SYSTEM AND SEPARATING METHOD
Organization Name
Inventor(s)
Naoto Sakamoto of Kikuchi-gun (JP)
Takashi Sakaue of Kikuchi-gun (JP)
Kwangwoo Seo of Kikuchi-gun (JP)
SEPARATING APPARATUS, SEPARATING SYSTEM AND SEPARATING METHOD
This abstract first appeared for US patent application 18761900 titled 'SEPARATING APPARATUS, SEPARATING SYSTEM AND SEPARATING METHOD
Original Abstract Submitted
A separating apparatus includes a notch device configured to form a notch by inserting a sharp member into a side surface located most adjacent to a separation start point; a first holder including a start point side attraction member and a start point side elevating mechanism; a second holder configured to attract and hold a second substrate; a detection device; and a controller configured to form the notch in the side surface, and lower the start point side attraction member to attract it to a first substrate. The controller moves the start point side attraction member from a standby position to a speed-change position at a first speed; moves the start point side attraction member from the speed-change position to be close to the first substrate at a second speed; and stops the start point side attraction member when it is determined that the first substrate is attracted.